QNP3 Series XYZ Piezo Positioning Stages
Aerotech's QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics and excellent geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm).