XYZ Piezo Stage
PI's closed-loop piezo system handles the motion part in the TERA-print TERA-Fab™ E series platform. The piezo XYZ stage precisely moves the substrate under the beam pen array between light exposures and enables rapid reconstruction of an arbitrary, high-resolution pattern - up to 100,000s of sub-250nm pixels at a time. The nanopositioning mechanism is actuated by special multilayer piezo stacks whose ceramic encapsulation provides protection against humidity and moisture, important in bio-chemical applications.