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Aerotech’s QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics and excellent geometric performance in a compact three-degree-of-freedom (DoF) package. They come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm). The design is ideal for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation.
QNP3 piezo stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure superior multi-axis accuracy, high stiffness, and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response.
The patent-pending drive design minimizes X and Y yaw errors while still maintaining an Abbe-compliant metrology system. This design results in unmatched positioning performance over the entire XY travel space. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors.
QNP3 stages are available with closed or open-loop feedback. The unique capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.
When coupled with Aerotech’s Q-series controllers and drives, QNP3 stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high positioning bandwidth. Advanced software options, such as Dynamic Controls Toolbox and Motion Designer, provide a variety of highly-effective, easy-to-use tools including Iterative Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.
An optional mounting plate provides direct mounting to English or metric breadboard optical tables. A solid tabletop is also offered. QNP3 piezo stages are available in custom materials, and in vacuum-prepared versions, upon request.
Related Glossary Terms
- metrology
metrology
Science of measurement; the principles on which precision machining, quality control and inspection are based. See precision machining, measurement.
- shaping
shaping
Using a shaper primarily to produce flat surfaces in horizontal, vertical or angular planes. It can also include the machining of curved surfaces, helixes, serrations and special work involving odd and irregular shapes. Often used for prototype or short-run manufacturing to eliminate the need for expensive special tooling or processes.
- stiffness
stiffness
1. Ability of a material or part to resist elastic deflection. 2. The rate of stress with respect to strain; the greater the stress required to produce a given strain, the stiffer the material is said to be. See dynamic stiffness; static stiffness.
