With the addition of more standard, vacuum compatible hexapods, the load range of 5 to 80kg is covered; custom models for loads up to 1 ton have been designed as well. The hexapods provide very high resolution and repeatability to 0.1µm and 2 µrad, respectively. The vacuum series was designed from the ground up for vacuum compatibility, with each component qualified to work under the specified conditions. Everything, from the base materials, nuts and bolts, encoders, cables, limit switches, was selected for optimal performance.