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PI (Physik Instrumente) has engineered and released two new compact multiple-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with high stability based on low heat generation and a drift free auto-position-clamping feature.
N-865 High End – Low Profile 6-Axis Motion Platform, 2 Nanometer Minimum Incremental Motion
This high-end system is based on proprietary PiezoWalk linear motor technology. It provides 2 nanometer minimum incremental motion in X, Y, Z with 0.2 microradian angular motion in Pitch, YAW, and Roll. The N-865 can support loads up to 15N. Integrated proprietary linear encoders measure the position with 0.5 nanometers resolution.
Q-845 Compact 6-Axis Motion Platform, 6 Nanometer Minimum Incremental Motion
The Q-845 is high performance, compact 6-axis system based on piezo inertia drives, providing minimum incremental motion as small as 6 nanometers. Integrated linear encoders measure the position with 1 nanometer resolution and provide feedback to the 6-axis controller. The Q-845 supports loads to 10 N and achieves velocities up to 5mm/sec.
Both 6-axis systems provide software programmable virtual pivot points, a decisive feature for alignment processes such as required in SiP and micro-optics applications.
Related Glossary Terms
- linear motor
linear motor
Functionally the same as a rotary motor in a machine tool, a linear motor can be thought of as a standard permanent-magnet, rotary-style motor slit axially to the center and then peeled back and laid flat. The major advantage of using a linear motor to drive the axis motion is that it eliminates the inefficiency and mechanical variance caused by the ballscrew assembly system used in most CNC machines.
- pitch
pitch
1. On a saw blade, the number of teeth per inch. 2. In threading, the number of threads per inch.
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