XY Single Module Precision Linear Stage Family

In addition to their popular air bearing planar XY stages, a series of integrated XY stages with mechanical bearings is offered by global leader in precision motion systems, PI (Physik Instrumente). These integrated XY stages, engineered for higher loads, are available with 3-phase linear direct-drive motors for higher speed and ballscrews for higher push/pull forces, respectively. Available with nanometer resolution linear encoders, these XY stages are well-suited for applications in biotechnology, industrial automation, laser processing, and flat panel display testing and manufacturing.

The integrated mechanical design allows for a lower profile and improved geometric performance, when compared to modular XY-stage assemblies of two single axis translation stages bolted together. Due to the improved support, planar XY tables are stiffer and flex less compared to XY-combinations of single-axis linear stages, especially when the individual axes are moved to their extreme positions.

The ballscrew variants – L-731, L-738, and L-741 – can be powered by stepper motors and servo motors, respectively. The direct-drive, linear-motor variants – V-731, V-738, and V-741 – are driven by an ironless 3-phase motor for cogging-free ultrasmooth motion, for highest demands on precision. Ironless motors allow smoother, vibration-free running over a wide velocity range. Both three-stage families provide sensor resolution from 0.1µm to 0.001µm, with mechanical position repeatability to 0.05µm.