In the FocusONE laser machine, SCANLAB's micro-drilling head is connected to an optical measuring system via EtherCAT. The stoba measuring system can inspect drill holes starting from 25 µm in diameter. The integrated software for machine control analyzes the measuring results and automatically adapts the process parameters as required. If, for example, the drilling result shows a trend which indicates a reduction in the diameter of a few µm, the system automatically corrects the drilling diameter based on an individually set threshold. For reliable batch tracing, the entire production process is, of course, comprehensively monitored and recorded.