PI (Physik Instrumente) LP

Products

Piezoelectric materials convert electrical energy into mechanical energy and vice versa; the so-called inverse piezo effect is harnessed for the generation of oscillation and precision motion. For ultrasonic applications that require high bandwidth, hemispheres and hollow spheres are currently available with an outside diameter range from 2 –…

L-836 Stepper Motor Linear Slides

PI introduces the new L-836 Stepper Motor Linear Slides, a newly designed motorized linear translation stage family that combines high performance, small dimensions, and low cost of ownership. These compact micro-positioning translation stages are driven by a robust, direct-drive rotary stepper motor, available as in-line design and folded drive…

Motorized Mirror Mounts

The PI motorized optical mounts are suited for laser applications and are available for ambient and vacuum conditions. Motorized kinematic mirror mounts provide a means to control the pitch and yaw axes of a mirror, usually to direct or deflect a laser beam. To achieve large angles up to 16 degrees while keeping the dimensions as small as possible…

Driving Future Technologies Brochure

Backed by decades of nanopositioning experience, PI delivers motion control solutions for optimizing manufacturing process and quality control, speeding up data and information transmission, and developing better medical diagnostics and therapies.

6-Axis Robotic Stage

PI’s hexapod 6-axis motion controllers and hexapod software are based on decades of experience with parallel kinematic motion systems. They are easy to program, allow the user to change the center of rotation with one command, and come with high level alignment functions built in. PI’s hexapod motion simulator software calculates the limits of…

A-811, G-901 Motion Controllers

Equipped with ultra-low noise PWM drives, the A-811 single axis controller integrates a closed loop servo controller with drive in a compact case. The G-901 controllers are also based on ACS hardware and EtherCat® connectivity, providing up to 1500W output per axis.

XYZ Nanopositioning Stage

The compact 3-axis linear nanopositioning stage is based on PI’s A-142 mini air bearing linear slide and suited for high precision, high-dynamics positioning, scanning and alignment applications in fields such as fiber optics, photonics, semiconductors, micro-mechanical systems, etc.

Low Profile 5-Axis Air Bearing Motion System

Compared to mechanical, roller or ball bearing based linear stages and rotary stages, air bearings are friction free and wear free and generate no particles during operation, making them clean-room compatible and ideal for dynamic, 24/7 duty cycle automation applications. In an air bearing stage, the moving platform glides on a thin film of air.…

R-Theta 2-Axis Precision Motion Stages

The fast controllers allow highly precise triggering with 0.01% time tolerance between signals. Trigger signals can be derived off absolute encoders or analog signals (sin/cos encoder), enabling higher precision, safer, and simplified solutions as compared to outdated digital encoder-only triggers. With the modern PI motion controllers, a trigger…

Piezo Actuators

Cost optimized for large quantities, the lightweight P-604 amplified piezo fixture actuator provides a large travel of 300µm in a small footprint of 13x20mm, engineered for a long maintenance-free life. Zero-play flexure guides deliver frictionless and ultra-straight motion. At the heart of the motion-amplifying flexure design is a multilayer…

Mini 6-DOF Hexapod 6-Axis Robotic Stage

PI’s hexapod family is growing with the addition of H-811.I2V vacuum hexapod. With a load capacity of 5kg and linear travel ranges up to 34mm and rotary ranges up to 42°, the new hexapod provides very high resolution and repeatability ±0.06µm.

A-634 Low-Profile Rotary Table Models

The rotary tables use low-cogging frameless and slotless torque motors to enable this excellent geometric performance. Different designs allow use in horizontal, vertical or any orientation. Air bearings guarantee a virtually unlimited service life with no wear, and zero required maintenance. As with all other PI linear air bearings and stages,…

E-709 Closed-Loop Piezo Controller and Integrated Driver

The E-709 compact digital piezo servo controller / amplifier and driver was designed providing 20kHz sampling rate, twice the power of its predecessor along with multiple times is positioning resolution. When used in image processing, scanning and microscopy applications, its advanced features such as high-performance linearization, high speed…

P-725 PIFOC Piezo Flexure Stage

Equipped with direct measuring sensors for the highest linearity and stability, the frictionless piezo drive ensures rapid response, high stiffness, and a fast settling time of a few milliseconds. The computer-optimized play-free flexure guiding system enhances repeatability and focusing stability.

Piezo Driver

With the addition of a new multi-channel, low noise piezo driver, PI is expanding its offering of high precision piezo amplifiers for applications that require electronics to drive multi-axis piezo positioning stages or need a multiple channel high voltage source in a compact, economical design. PI’s new E-413.x amplifier has bipolar operation…

V-508 Direct Drive Linear Stage

The direct drive linear motor provides minimum incremental motion of 1nm, equivalent to ~7 attoseconds of delay. This performance is made possible by an interferometric type linear encoder that provides 20 picometers resolution. The maximum optical delay the V-508 stage can provide is 1668ps, larger PI linear stage models can achieve up to 8000…

A-352 XY / XYZ Cartesian Gantry Systems

For applications requiring XYZ motion, a motorized vertical linear module can be added at the factory - voice coil motors, linear motors, and screw drive linear modules are available, all with counterbalance or break option. Customizations, such as stage base materials (granite, aluminum, etc), a steel base, or isolators as well as mounting…

A-142

This low-profile nanopositioning stage (only 27 mm high (1.1”)) is maintenance free, and due to its non-particle generating drive and guiding principle, cleanroom compatible. It delivers 10mm (0.4”) of hysteresis-free linear travel of its 75x80mm (≈3x3¼”) moving platform while supporting up to 3kg (6.6lbs) loads. The air bearing guide guarantees…

L-812 Motorized Linear Modules

L-812 linear motion modules are available with travel ranges from 102mm to 610mm (4” to 24”) and easily configurable. Two linear modules can be combined to form XY-tables and with the availability of the brake, a vertical axis can be added for XYZ multi-axis motion and precision automation applications. A folded drive train further facilitates…

V-855 and V-857 Linear Modules

The V-855 and V-857 product families were designed for high-load and high duty cycle industrial precision motion applications where traditional actuators or linear slides with lead-screw or timing-belt drives are not precise, robust or reliable enough. Due to the maintenance-free and friction free high-speed linear motors, greater productivity…

V-308 Nanopositioning Slide

The closed-loop linear slide uses an optical position sensor with sub nanometer resolution and a voice coil linear motor to allow vertical (or horizontal) travel up to 7mm with a velocity up to 200mm/sec (8”/sec) for fast accurate scanning. Guided by low friction cross-roller bearings, this low-profile linear slide delivers long lasting…

A-523 Z-Tip-Tilt

The compact format provides a rotation range up to 2° in theta-X / theta-Y and 5mm vertical (Z travel) range with excellent dynamics (up to 1g acceleration). The 250mm diameter (10”) platform can carry loads of 8kg (~18lbs), while the low profile of only 60mm (2.4”) keeps the center of gravity down, a great advantage in dynamic applications. The A…

V-931 Two-Axis Fast Steering Mirror Platform (FSM)

The compact, durable design produces a beam deflection angle to 8° in theta-X and theta-Y, with symmetrical motion characteristics delivered by its parallel kinematics design. The angular resolution of the standard model is 1µrad (higher resolution models are available). The two orthogonal tip/tilt axes share a common center of rotation, providing…

6DOF Hexapod Motion Systems

With the addition of more standard, vacuum compatible hexapods, the load range of 5 to 80kg is covered; custom models for loads up to 1 ton have been designed as well. The hexapods provide very high resolution and repeatability to 0.1µm and 2 µrad, respectively. The vacuum series was designed from the ground up for vacuum compatibility, with each…

Flexible Multi-axis Motion Sub-System

The XY base system is made of two 3-Phase motor powered V-417 linear stages with travel ranges from 204 to 407mm. Integrated absolute-measuring linear encoders provide better reliability, while eliminating the need to reference. A granite base plate is available for stability and can hold the G-901 EtherCat-based controller with ACS driver module…

Robot Operating System (ROS)

ROS drivers are the latest addition to its H-811 high performance hexapod 6-axis miniature robot, allowing fast, seamless integration into a ROS environment, with comfortable control using their well-known mechanisms. With an included URDF model in the driver package, the H-811.i2 hexapod can also be simulated and visualized.

XYZ Piezo Stage

PI’s closed-loop piezo system handles the motion part in the TERA-print TERA-Fab™ E series platform. The piezo XYZ stage precisely moves the substrate under the beam pen array between light exposures and enables rapid reconstruction of an arbitrary, high-resolution pattern - up to 100,000s of sub-250nm pixels at a time. The nanopositioning…

E-727 Piezo Nanopositioning Controller

The E-727 nanopositioning controller features an advanced digital servo providing significant advantages compared to conventional analog piezo nanopositioning controllers. Digital filters provide better linearity and higher bandwidth as well as on-the-fly parameter adaptation to changed loads or production requirements. Software-adjustable notch…

RS-40 Rotary Stage and M-111 Linear Stages

With 360 degree rotation range and 20N load capacity, the RS-40 V7 stage boasts high angular velocity of 20°/sec and minimum incremental motion and repeatability of 87 µrad. The 110, M-111 and M-112 vacuum linear stage series provide travel ranges of 5, 15 and 25mm and are suitable for vacuum up to 10-6 hPa.

V-817 linear stages

The V-817 linear stages, engineered for highly dynamic and precise motion, boast a load capacity of 600N, travel ranges from 8” (204mm) to 32” (813mm), and velocities to 3000mm/sec. Driven by 3-phase linear motors and guided by robust recirculating ball bearing guides, the low-profile design of only 63mm minimizes moving mass and tilting errors.…

F-712.IRP1, F-712.IRP2 Optical Power Meters

This photometer detects an optical input signal and converts it into a precision, logarithmic voltage signal with high resolution. The optical power meter is used to find the maximum optical intensity quickly when integrated in fully automatic, optical FMPA alignment systems. The logarithmic scaling of the output signal is particularly…

F-122 Compact 5-Axis Motorized Fiber Positioning System

The F-122 motorized 5DOF positioning stage is a compact solution for aligning (silicon) photonics and optics components, such as fibers, waveguides, lenses. As the leading innovator of high precision motion control solutions for 50 years, PI offers a host of 3-axis XYZ to 6-axis precision motion systems for automation and research.

Free Hexapod-Simulator Software

Powerful simulation software from PI (Physik Instrumente), a leader in precision motion control and nanopositioning solutions, determines if a hexapod is suitable for your specific positioning task, in terms of workspace, load, center of mass, and operating orientation. The tool helps you to find out which model you should invest in.

Precision Linear Stage Family for Ultra High Vacuum Applications

The new vacuum linear stage series was designed from the ground up for vacuum compatibility, with each component qualified to work under the specified conditions. Everything, from the base materials, nuts and bolts, encoders, cables, limit switches was selected for optimal performance.

System Configurator for integrated Inverted Microscope Positioning System

Precision positioning of the sample is a must for accurate results when using an inverted microscope. PI provides options with high stability motorized stages for long travel ranges with wide dynamic range, manual sample positioning / prepositioning, piezo scanning stages, and z-positioning / vertical stages to move the sample or the objective.

PIglide A-688 Rotary Air Bearing

Air-bearings have no rolling or sliding elements and deliver frictionless, non-contact motion, resulting in negligible reversal error, better flatness, and minimal wobble and eccentricity. All these are ideal prerequisites for applications such as inspection and metrology, calibration, and scanning of high-end parts (i.e., infrared and precision…

A-311 Line of Low-Profile Planar XY Air Bearing Stages

PI adds to its compact A-311 line of low-profile planar XY air bearing stages. PI’s U.S.-based air bearing R&D and manufacturing teams have created two new versions with travel ranges of 200mm x 200mm and 300mm x 300mm. Planar scanning stages are suitable for semiconductor inspection, laser marking, optical metrology and other precision motion…

A-351 Gantry Motion System

The A-351 gantry motion system is related to the A-341 hybrid air bearing gantry. Driven by linear motors and guided by precision mechanical linear bearings, the system provides high speed and accuracy, at a lower price compared to its air bearings-based brother. Advanced absolute linear encoders increase accuracy and reduce start-up time by…

XY Single Module Precision Linear Stage Family

In addition to their popular air bearing planar XY stages, a series of integrated XY stages with mechanical bearings is offered by global leader in precision motion systems, PI (Physik Instrumente). These integrated XY stages, engineered for higher loads, are available with 3-phase linear direct-drive motors for higher speed and ballscrews for…

V-610 Rotation Stage

PI expands its PIMag series of high dynamics linear and rotary positioning systems with a new high-performance rotation stage. The V-610 is equipped with a high-force 3-phase torque motor direct incremental encoder for position feedback and closed-loop operation.

XY Ultrasonic Motor Stage

Precision motion specialist PI (Physik Instrumente) adds a new integrated XY stage to its compact high-speed positioning stage roster, all powered by ultrasonic piezo-linear motors. The patented motors provide smooth motion, high resolution and rapid step and settle response while the self-clamping drive principle locks the platform in place…

EtherCat Compatible Version of E-727 Digital Piezo Controller Family

EtherCat is becoming a communication standard in industrial automation. The continuous need for higher precision in R&D, test and manufacturing drives the demand for more high-performance, piezo-based nano-positioning and scanning systems; semiconductor manufacturing, optics and photonics are typical examples. PI (Physik Instrumente) now…

NanoCube Moving Platform

Based on a parallel-kinematic design, with only one lightweight moving platform for all three axes, PI’s P-616 is available with high precision and dynamics in a compact package. Also known as the NanoCube, it is the smallest and lightest system with capacitive feedback delivering 100µm travel range in 3 degrees of freedom.

L-505 Linear Translation Stage

PI’s new L-505 linear translation stage family is available with integrated linear encoders providing 0.05 microns and 0.005 microns resolution, respectively. The new design allows for very compact multiple-axis assemblies, at affordable prices. Many motor and drive variations are available, from fast DC-servomotors with linear encoders and low-…

V-417.336025E1 Long-Travel Linear Motor Stage

PI is offering the new V-417.336025E1 long-travel linear motor stage, providing 32 inches of travel (813mm). The direct drive stage achieves high velocities to 79”/sec (2m/sec) based on a direct drive ironless linear servo motor. High accuracy, repeatability and functionality are guaranteed by an integrated absolute-measuring linear position…

Miniature Transducers

In 1880, brothers and colleagues Jacques and Pierre Curie discovered that putting pressure on certain materials created electricity. Taken from the Greek word for “squeeze” (piezein), piezoelectricity was born. Commonly known as the “piezo effect,” it also occurs when an electrical field is applied and changes the dimensions of materials. More…

A-351 MGS Compact Mechanical Gantry System

PI adds to its family of precision automation subsystems with the A-351 MGS, a compact mechanical gantry system engineered to deliver maximum throughput for applications that require controlled precise overhead motion. The gantry is driven by linear motors and each axis is equipped with preloaded linear bearings.

L-412/V-412 Linear Stage Family

PI’s new L-412/V-412 linear stage family is designed for high-precision industrial automation and positioning applications with medium loads. Both linear motor-driven and ballscrew-driven versions are offered to cover high speed motion and to provide high push/pull force for vertical applications.

A-341 HGS Hybrid Gantry

The bridge-like design of a gantry provides the framework for controlled precise overhead motion that is often sought after for 3D printing, assembly, pick-and-place, alignment, inspection and industrial automation applications. PI introduces the A-341 HGS hybrid gantry – designed to combine maximum throughput with smooth and highly accurate…

Model E-619 High-Power Piezo Amplifier

PI (Physik Instrumente) LP has released the new model E-619, a high-power piezo amplifier designed to drive high-capacitance multilayer piezo actuators with rapid rise times or high frequencies. As a special form of electro-ceramics, piezo materials are the industry standard when it comes to speed, force and precision in a small package.

A-341 Hybrid Gantry XY/XYZ Positioning Stage

PI's new A-341 hybrid gantry XY/XYZ positioning stage provides the framework for controlled precise overhead motion that is often sought after for 3D printing, assembly, pick-and-place, alignment, inspection and industrial automation applications. The A-341 HGS hybrid gantry is designed to combine maximum throughput with smooth and highly…

V-738 XY Translation Stage

The V-738 XY translation stage is designed to meet high positioning accuracy demands, for applications such as industrial automation, laser processing and flat panel display test and manufacturing. The mechanical design is based on a three-piece arrangement for improved geometric performance. In contrast to XY-stage assemblies where two single-…

H-811.F2 Compact Hexapod

PI has added a high dynamics model to its range of compact hexapods. Designed for photonics alignment applications, the hexapod provides 6 degrees of freedom, actuator resolution of 5 nanometers and repeatability as good as 60 nanometers, while providing velocities to 20mm/sec. Sustaining loads to 5kg, the new H-811.F2 features a removable…

L-417 and V-417 Reference-Class Linear Stages

The new reference-class linear stages family, L-417 and V-417, from PI (Physik Instrumente), are available in ballscrew and linear motor configurations, both cost effective designs, offering high resolution with improved tracking performance, smaller tracking error and improved settling time. Applications for both include high demands on dynamics…

F-712.PM1 High-Speed Optical Power Meter

The new F-712.PM1 high-speed optical power meter from PI (Physik Instrumente) converts optical signals and currents of photodiodes into a high resolution, logarithmic analog voltage signal. Its high bandwidth of 20kHz enables faster optical alignment, when used in conjunction with PI’s high-speed FMPA photonics alignment systems for SiP (Silicon…

A-635/A-637 PIglide Low-Profile Stages

The new A-635/A-637 PIglide low-profile stages from PI (Physik Instrumente) have no rolling or sliding elements and deliver frictionless, noncontact motion, resulting in negligible reversal error, better wobble, eccentricity and velocity stability – suitable prerequisites for high-end industrial applications such as inspection, metrology,…

E-709 Low-cost Digital Piezo Nanopositioning Controllers

PI (Physik Instrumente) L.P has expanded its E-709 family of low-cost digital piezo nanopositioning controllers with a new plug-in module for the C-885 PIMotionMaster modular controller system.

4/6/8 Channels for Air Bearing Motion Systems

PI (Physik Instrumente) LP has released a new high-performance motion controller designed to handle 4, 6 or 8 axes of PIglide air bearing positioning stages and precision automation sub-systems. Air bearings provide many advantages compared to mechanical bearings, such as no-particle generation, frictionless, vibration-free motion, highly constant…

V-551 Family of Ultraprecision Positioning Stages

PI released a new precision feedback option for its linear stages equipped with direct-drive ironless 3-phase motors. The V-551 family of ultraprecision positioning stages models is equipped with precision crossed roller bearings featuring anticreep cage assist and excellent guiding accuracy (1µm straightness / flatness per 100mm).

Miniature Precision Positioning Stages

PI (Physik Instrumente) delivers a family of compact linear and rotary stages driven by ceramic direct-drive motors. The patented ultrasonic motors provide smooth motion with high resolution and a high dynamic range.

H-825 Hexapod

With the usability of 6-axis hexapods increasing in research and industry applications, PI introduces a new medium-load 6-axis precision motion platform, the H-825 hexapod. The H-825 provides a self-locking load capacity up to 30 kg (66 lbs).

E-871.1A1N Digital Servo Controller

PI (Physik Instrumente) LP announces a new compact closed-loop motion controller. The new E-871.1A1N digital servo controller is the latest model in a series of drivers and controllers specifically designed for inertia-motor based opto-mechanical actuators (piezo ratchet drives) that are widely used in the semiconductor, laser and photonics…

C-884.6DC 6-Axis Servo Motor Controller

PI (Physik Instrumente) has released a new 6-axis servo motor controller – the C-884.6DC. Most modern precision motion systems are driven by servo motors, because they provide high torque, fast acceleration, smooth motion with a wide dynamic speed range and fast start/stop performance.

PIMag Series of High Dynamics Linear Motor Stages

PI expands its PIMag series of high dynamics linear motor stages with a new compact positioner for automation tasks. The new V-408 stage is equipped with an incremental linear encoder for direct position measurement and a high-force 3-phase linear motor drive.

N-865 and Q-845 6-Axis Motion Platforms

PI (Physik Instrumente) has engineered and released two new compact multiple-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with high stability based on low heat generation and a drift free auto-position-clamping feature.

H-811.i2 Compact Hexapod

PI has added a higher performance model to its range of compact hexapods. The New H-811.i2 provides twice the velocity along with sensor resolution up to eight times higher compared to the current H-811.D2 miniature hexapod.

Flexible Printed Circuits

Fast response, high bandwidth and force, and virtually unlimited resolution make piezoelectric transducers invaluable to modern high tech applications including flow measurement, distance gauging, bio-medical dispensing and aerosol generation, as well as metrology, semiconductor testing, and aerospace technology. PI offers value-added piezo…

P-630 Nanopositioning Stages

PI (Physik Instrumente) LP delivers new solutions for very small position changes, coupled with speed and high force in its P-630 nanopositioning stages. With design flexibility to meet custom assembly requirements and proven demonstrated reliability of many billions of cycles, PI piezo actuators are being utilized in research and industry…

P-763.22C Nanopositioning Stage

PI's P-763 XY nanopositioner is a new affordable addition to PI's range of piezo stage solutions. This compact two-axis nanopositioning system is geared towards cost-sensitive applications in OEM and research where very high precision, high throughput and fast step& and settle in a few milliseconds are required.